한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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- Pages.374-378
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- 1999
Ba(1-x)YxTi $O_3$ 계 박막의 미세구조 및 전기적 특성
Electrical Properties and Microstructure of Ba(1-x)YxTi $O_3$ system Thin Films
초록
Thin Films of BaYTiO system were Prepared by frequency (rf)/dc magnetron sputtering method. The preparation of target were accomplished by the mixed oxide method, and their composition consisted of the
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