한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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- Pages.34-38
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- 1999
MERIE형 금속 식각기에 의한 몰리브덴 식각 연구
A Study on Etching of Molybdenum by MERIE Metal Etcher
초록
In this study, molybdenum thin films were etched with the various Cl
키워드