한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1999년도 추계학술대회 논문집
- /
- Pages.311-314
- /
- 1999
솔-젤법으로 제작한 PZT 이종층 박막의 구조적 특성
Microstructural Properties of PZT Heterolayered Thin Films Prepared by Sol-Gel Method
초록
Ferroelectric PZT heterolayered thin films were fabricated by spin coating method on the Pt/Ti/SiO
키워드