Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.278-281
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- 1999
A Study on Electrical Characteristics of the PLZT Thin Film Acorrding to Thickness for DRAM Capacitor
DRAM소자용 PLZT 박막의 두께에 따른 전기적 특성에 관한 연구
Abstract
PLZT thin films on Pt/Ti/SiO