Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.159-162
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- 1999
Fabrication and Electrochemical Characterization of All Solid State Thin Film Micro-Battery by in-situ sputtering
In-situ 스퍼터링을 이용한 마이크로 박막 전지의 제작 및 전지 특성 평가
Abstract
All solid state thin film micro-batteries consisting of lithium metal anode, an amorphous LiPON electrolyte and cathode of vanadium oxide have been fabricated and characterized, which were fabricated with cell structure of Li/LiPON/V