Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.132-135
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- 1999
The Dielectric Characteristics of ($Ba_x Sr_{l-x})TiO_3$ Thin Films by the Spin-Coating method
스핀코팅법에 의한 ($Ba_x Sr_{l-x})TiO_3$ 박막의 유전 특성에 관한 연구
Abstract
Recently, the ceramics of high permittivity are applied to DRAM and FRAM. In this study, (B
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