Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.95-98
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- 1999
The study of UV emission in ZnO thin films fabricated by Pulsed Laser Deposition
레이저 증착법에 의해 제작된 ZnO 박막의 UV 발광특성연구
Abstract
ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films at an oxygen pressure of 350 mTorr, the experiment has been Performed at various substrate temperatures in the range of 20
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