Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.162-162
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- 1999
Effects of Process Variables on the Microstructure and Gas Sensing Characteristics of Magnetron Sputtered $SnO_2$ Thin Films
마그네트론 스퍼터링 증착 조건에 따른 $SnO_2$ 박막의 미세구조와 가스검지특성 변화
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