Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.153-153
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- 1999
The Preferred Orientation Growth of Aluminum Nitride Thin Films deposited by RF Magnetron Sputtering
RF Magnetron Sputtering법으로 제조한 AlN박막의 우선배향성
Abstract
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