Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.142-142
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- 1999
Inductively coupled $Cl_2/BCl_3/Ar$ plasmas etching of sapphire wafer
유도결합형 $Cl_2/BCl_3/Ar$ 플라즈마를 이용한 sapphire wafer의 건식 식각
Abstract
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