Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.140-140
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- 1999
EFFECT OF THE OXYGEN RADICAL ON ITO THIN FILM DEPOSITED AT ROOM TEMPERATURE USING IBAD(ION BEAM ASSISTED DEPOSITION) METHOD
OXYGEN ION BEAM ASSISTED DEPOSITION 법으로 유기막 위에 증착된 상온 ITO (INDIUM TIN OXIDE) 박막의 특성
- Kim, J. S. (Sung Kyun Kwan University Dept.of Materials Engineering) ;
- J. W. Bae (Sung Kyun Kwan University Dept.of Materials Engineering) ;
- Kim, H. J. (Sung Kyun Kwan University Dept.of Materials Engineering) ;
- Lee, N. E. (Sung Kyun Kwan University Dept.of Materials Engineering) ;
- G. Y. Yeom (Sung Kyun Kwan University Dept.of Materials Engineering)
- Published : 1999.11.01
Abstract
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