Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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The contact properties between Platinum and poly-silicon

다결정 실리콘과 백금 전극사이의 접촉저항 특성

  • Shin, Woong-Chul (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
  • Park, Eun-Suck (Department of Materials Engineering, Chungnam National University, Daeduk Science Town) ;
  • Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University, Daeduk Science Town)
  • Published : 1999.11.01
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