Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
- /
- Pages.101-101
- /
- 1999
Selective-area deposition of TiO$_2$ thin film using organic thin-layer and metal organic chemical vapor deposition
미세접촉인쇄와 금속-유기 화학증착법에 이용한 산화티타늄 박막의 형상화
Abstract
Keywords