Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1999.11a
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- Pages.96-96
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- 1999
The Deposition of Fluorinated Thin Films by Thermal Evaporation and PECVD(Plasma Enhanced Chemical Vapor Deposition
기상증착과 PECVD를 이용한 불화 유기박막의 증착
Abstract
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