한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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- Pages.109-109
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- 1999
Characteristics of Polymer irradiated by Low energy Ion Beam
- sung Han (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
- Yoon, Ki-Hyun (Department of Ceramic Engineering, Yonsei university) ;
- Jung, Hyung-Jin (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
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Koh, Seok-Keun
(Thin Film Technology Research Center, Korea Institute of Science and Technology)
- 발행 : 1999.07.01
초록
Recently, low energy ion beam irradiation has been adopted for surface modification. Low energy ion beam irradiation has many advantages in polymer engineering such as weak damage, good adhesion, noticeably-enhanced wettability(less than 15 degree), good reproducibility and so on. In this experiment, chemical reactions between free radicals and environment gas species have been investigated using angle-resolved XPS and TRIM code. In the case of low ion beam energy (around 1 keV), energy loss in polymer is mainly originated from atomic collisions instead of electronic interference. Atomic collisions could generated displaced atoms and free radicals. Cold cathode-ion source equipped with 5cm convex grid was used in an O2 environment. Base and working pressure were 5
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