한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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- Pages.78-78
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- 1999
Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser
- S.J. Ahn (department of Physics, Sun Moon University) ;
- Kim, D.W. (department of Physics, Sun Moon University) ;
- Park, S.S. (department of Physics, Sun Moon University)
- 발행 : 1999.07.01
초록
Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1
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