Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference (한국초전도저온공학회:학술대회논문집)
- 1999.02a
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- Pages.26-29
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- 1999
Growth of Large Area $YBa_{2}$ $Cu_{3}$ $O_{7-x}$Thin Films by Hollow Cathode Discharge Sputtering System
할로우 캐소드 방전 스퍼터링 시스템을 이용한 대면적 $YBa_{2}$ $Cu_{3}$ $O_{7-x}$ 박막 성장
Abstract
Superconducting
Keywords