한국조명전기설비학회:학술대회논문집 (Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference)
- 한국조명전기설비학회 1999년도 학술대회논문집-국제 전기방전 및 플라즈마 심포지엄 Proceedings of 1999 KIIEE Annual Conference-International Symposium of Electrical Discharge and Plasma
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- Pages.46-52
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- 1999
Realization of novel plasma performances based on systematic understanding of plasma behaviour using laser diagnostics
- Muraoka, K. (Interdisciplinary Graduate School of Engineering Sciences, Kyushu University)
- 발행 : 1999.11.01
초록
Laser diagnostics have been extensively used to understand plasma behaiviour under different discharge conditions. Measurements were performance for (i) electric field, (ii) electron temperature and density, and (iii) reaction products due to chemical reactions by electron impacts. The knowledge thus gained has been extensively used to realize novel plasma performances, such as epitaxial thin film depositions using plasma sputtering, performance improvements of discharge-pumped excimer laser, and developments of environmental equipment.
키워드