Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 1999.08a
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- Pages.178-179
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- 1999
The effect of polishing slurry temperature on the surface roughness in super-polished substrates
Polishing slurry 온도가 super-polished 기판의 표면거칠기에 미치는 영향
Abstract
Keywords