한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
- /
- Pages.93-98
- /
- 1999
비접촉식 4-전극형 전기용량 센서를 이용한 in situ 정밀측정
Precise in situ Measurement using Non-Contacting Capacitive Sensor with 4-Electrodes
초록
Non-contacting capacitive sensors, based on principle of the cross capacitor, for measuring small displacement less than 1.95
키워드