Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 1999.10a
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- Pages.93-98
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- 1999
Precise in situ Measurement using Non-Contacting Capacitive Sensor with 4-Electrodes
비접촉식 4-전극형 전기용량 센서를 이용한 in situ 정밀측정
Abstract
Non-contacting capacitive sensors, based on principle of the cross capacitor, for measuring small displacement less than 1.95
Keywords