Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
- /
- Pages.743-745
- /
- 1998
A Study on Dielectric Properties of SCT Thin Films with substitutional contents of Ca
SCT 박막의 Ca 치환량에 따른 유전특성에 관한 연구
- Paek, B.H. (KwangWoon Univ.) ;
- Kim, J.S. (KwangWoon Univ.) ;
-
Jeong, H.D.
(MokPo Univ.)
;
-
Lee, S.I.
(ChungJu Univ.)
;
-
Kim, Y.J.
(ChungJu Univ.)
;
-
Kim, C.H.
(KwangWoon Univ.)
;
-
Lee, J.U.
(KwangWoon Univ.)
- Published : 1998.11.28
Abstract
SCT thin films were deposited with substitutional contents of Ca using RF magnetron sputtering method, and the structural and dielectric properties are investigated. SEM and XRB were examined to analysis of structural characteristics. The crtstallinity of SCT thin films and dielectric constant were increased at Ca 15[mol%]. While, it was decreased when the substitutional contents of Ca exceed over 15[mol%].
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