Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.11a
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- Pages.27-28
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- 1998
The Electrical Properties of Metal and Low Dielectric Thin Film using Polyimide as Interlayer Dielectric, ILD
층간절연막으로 저유전박막 폴리이미드와 금속의 전기적 특성
Abstract
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