Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 1998.05a
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- Pages.43-44
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- 1998
Characteristics of $TiB_2$ thin films prepared by R.F sputtering
R.F sputtering법으로 제조한 $TiB_2$ 박막의 특성
Abstract
Keywords