한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.153.2-153
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- 1998
MOCVD TiN FOR HIGH TEMPERATURE PROCESS
- Lee, Sang-Hyeob (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Kim, Jeong-Tae (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Seo, Hwan-Seok (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Chae, Moo-Sung (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..) ;
- Kim, Sam-Dong (Semiconductor Research Division, HYUNDAI Electronics Ind. Co..)
- 발행 : 1998.08.01