Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.153.1-153
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- 1998
APPLICATION OF CVD-Ti/TiN BARRIER METAL FOR GIGA-BIT DRAM DEVICES
- Kim, Jeong-Tae (Semiconductor Research Division, HYUNDAI Electronics Ind. Co.) ;
- Chea, Moo-Sung (Semiconductor Research Division, HYUNDAI Electronics Ind. Co.) ;
- Lee, Sang-Hyeob (Semiconductor Research Division, HYUNDAI Electronics Ind. Co.) ;
- Kim, Sam-Dong (Semiconductor Research Division, HYUNDAI Electronics Ind. Co.)
- Published : 1998.08.01
Abstract
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