PHOTOLUMINESCENCE INDUCED BY Si--IMPLANTATION INTO $SiO_2$ LAYERS AT ELEVATED TEMPERATURES

  • Kim, H.B. (ASSRC & Dept. of Physics, Yonsei Univ.) ;
  • Whang, C.N. (ASSRC & Dept. of Physics, Yonsei Univ.) ;
  • Im, S. (Dept. of Mattalurgical Engineering, Yonsei Univ.) ;
  • Jeong, J.Y. (Dept. of Mattalurgical Engineering, Yonsei Univ.) ;
  • Oh, M.S. (Dept. of Mattalurgical Engineering, Yonsei Univ.) ;
  • Song, J.H. (Advanced Analysis Center, KIST)
  • 발행 : 1998.08.01