한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.99.3-99
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- 1998
SELF-ALIGNED FABRICATION OF SILICON V-GROOVE AND FLIP-CHIP SOLDER BUMP PADS USING METAL PROTECT10N METHODS DURING KOH SILICON ETCHING
- Lee, S.H. (Semiconductor Division, ETRI) ;
- Joo, G.C. (Semiconductor Division, ETRI) ;
- Park, K.S. (Semiconductor Division, ETRI) ;
- Song, M.K. (Semiconductor Division, ETRI) ;
- Kim, H.M. (Semiconductor Division, ETRI) ;
- Pyun, K.E. (Semiconductor Division, ETRI)
- 발행 : 1998.08.01