Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.94.4-94
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- 1998
FABRICATION OF GAN MESFET USING THE PHOTOELECTROCHEMICAL ETCHING PROCESS
- Lee, W.S. (Device & Materials Lab, AD Group. LG CIT) ;
- Choi, Y.H. (Device & Materials Lab, AD Group. LG CIT) ;
- Jung, K.W. (Device & Materials Lab, AD Group. LG CIT) ;
- Shin, M.W. (Dept. of Inorganic Materials Eng., Myongji Univ.) ;
- Moon, D.C. (Dept. of Electronic Mater. Eng., Kwangwoon Univ.)
- Published : 1998.08.01
Abstract
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