Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
- /
- Pages.81.3-81
- /
- 1998
BULK MICROMACHINED Z-AXIS CYROSCOPE
- Baek, S. S. (Samsung Advanced Institute of Technology) ;
- Lim, G. B. (Samsung Advanced Institute of Technology) ;
- Oh, Y. S. (Samsung Advanced Institute of Technology)
- Published : 1998.08.01
Abstract
Keywords