SILICON CARBIDE THIN FILMS SYNTHESIZED BY PULSED YAG LASER DEPOSITION

  • Suda, Y. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
  • Kawasaki, H. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
  • Terajima, R. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
  • Emura, M. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
  • Baba, K. (Tech. Center of Nagasaki) ;
  • Abe, H. (Ceramic research Center of Nagasaki) ;
  • Ebihara, K. (Dept. of Electrical and Computer Eng., Kumamoto Univ.) ;
  • Aoqui, S. (Dept. of Electrical Kumamoto Institute of Tech.)
  • Published : 1998.08.01