Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.81.1-81
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- 1998
SILICON CARBIDE THIN FILMS SYNTHESIZED BY PULSED YAG LASER DEPOSITION
- Suda, Y. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
- Kawasaki, H. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
- Terajima, R. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
- Emura, M. (Dept. of Electrical Eng. Sasebo National College of Tech.) ;
- Baba, K. (Tech. Center of Nagasaki) ;
- Abe, H. (Ceramic research Center of Nagasaki) ;
- Ebihara, K. (Dept. of Electrical and Computer Eng., Kumamoto Univ.) ;
- Aoqui, S. (Dept. of Electrical Kumamoto Institute of Tech.)
- Published : 1998.08.01
Abstract
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