한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.79.4-79
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- 1998
EVALUATION OF STRESS INDUCED DEFECTS DUE TO RECESSED LOCOS PROCESS
- Aoki, Yasuyuki (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
- Kawakami, Nobuyuki (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
- Shibahara, Kentaro (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
- Yokoyama, Shin (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.)
- 발행 : 1998.08.01