Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.79.3-79
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- 1998
DEFECT FORMATION IN SILICON WAGER SURFACE LAYER AND ITS INFLUENCE ON THE BULK PROPERTIES
- Kira L. Enisherlova (Sc. institute ″Pulsar″) ;
- Galina K. Ippolitova (ELLITNA-NT, R&D Co., Dm) ;
- Tatiana M. Tkacheva (ELLITNA-NT, R&D Co., Dm) ;
- Petrov, George-N (ELLITNA-NT, R&D Co., Dm)
- Published : 1998.08.01
Abstract
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