한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.79.1-79
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- 1998
TRENCH ETCHING FOR SHALLOW TRENCH ISOLATION USING $Cl_2/Ar$ PLASMA
- Kim, C.B. (Semiconductor Research Division, Hyundai Electronics Industries Co. Ltd.) ;
- Jun, B.J. (Semiconductor Research Division, Hyundai Electronics Industries Co. Ltd.) ;
- Kim, J.K. (Semiconductor Research Division, Hyundai Electronics Industries Co. Ltd.) ;
- Lee, D.D. (Semiconductor Research Division, Hyundai Electronics Industries Co. Ltd.) ;
- Seol, Y.S. (Semiconductor Research Division, Hyundai Electronics Industries Co. Ltd.)
- 발행 : 1998.08.01