한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
- /
- Pages.78.4-78
- /
- 1998
AUTOMIC-LAYER DEPOSITION OF SILICON NITRIDE
- Yokoyama, Shin (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.) ;
- Nakashima, Yoshimitu (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.) ;
- Ooba, Kenji (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.)
- 발행 : 1998.08.01