Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.78.3-78
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- 1998
DIRECT INTEGRATION OF PLATINUM ON POLY-SI SUBSTRATES BY METALOGANIC CHEMICAL SUBSTRATES BY METALOGRANIC CHEMICAL VAPOR DEPOSITION
- Choi, Eun-Suck (Dept. of Materials Engineering, Chungnam National University) ;
- Yoon, Soon-Gil (Dept. of Materials Engineering, Chungnam National University)
- Published : 1998.08.01
Abstract
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