한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
- /
- Pages.78.2-78
- /
- 1998
THE CHARACTERIZATION OF SHALLOW TRENCH ISOLATION CHEMICAL MECHANICAL PLANARIZATION(STI CMP) THROUGH THE ANALYSIS FOR RELATIONSHIP OF BETWEEN PATTERN AND NON-PATTERN WAFER
- Kim, Yong-Sik (FAB Division, ANAM Semiconductor) ;
- Lee, Yang-Won (FAB Division, ANAM Semiconductor) ;
- Kim, Dae-Young (FAB Division, ANAM Semiconductor) ;
- Kim, Sang-Yong (FAB Division, ANAM Semiconductor) ;
- Choi, Jae-Sung (FAB Division, ANAM Semiconductor)
- 발행 : 1998.08.01