한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.111.4-111
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- 1998
HOMOEPITAXIAL GROWTH OF HIGH QUALITY 6H-SiC THIN FILMS USING BIS-TRIMETHYLSILYLMETHANE BY CHEMICAL VAPOR DEPOSITION
- Jeong, Jae-Kyeong (School of Materials Science and Engineering, Seoul National University) ;
- Nah, Hoon-Joo (School of Materials Science and Engineering, Seoul National University) ;
- Kim, Hyeong-Joon (School of Materials Science and Engineering, Seoul National University)
- 발행 : 1998.08.01