FORMATION MECHANISM OF EPITAXIAL CoSi$_2$ IN EX-SITU Ti-CAPPING OME PROCESS

  • Kim, Gi-Bum (Dept. of Metallurgical Engineering, Yonsei Univ.) ;
  • Kwan, Joon-Seop (Dept. of Metallurgical Engineering, Yonsei Univ.) ;
  • Baik, Hong-Koo (Dept. of Metallurgical Engineering, Yonsei Univ.)
  • 발행 : 1998.08.01