Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.76.4-76
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- 1998
The Fabrication of CoSi$_2$ layer by Cobalt MOCVD
- Hwasung Rhee (Dept. of Materials Science and Engineering, KAIST) ;
- Ahn, Byung-Tae (Dept. of Materials Science and Engineering, KAIST)
- Published : 1998.08.01
Abstract
Keywords