SURFACE ACTIVATED BONDING AT ROOM TEMPERATURE USING 266nm Nd-YANG LASER

  • Itoh, Shunsuke (Research Center for Advanced Science and Technology, The University of Tokyo,) ;
  • Hosoda, Naoe (Research Center for Advanced Science and Technology, The University of Tokyo,) ;
  • Suga, Tadatomo (Research Center for Advanced Science and Technology, The University of Tokyo,)
  • 발행 : 1998.08.01