Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.76.3-76
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- 1998
TEM STUDY OF $Y_2O_3$ FILMS GROWN ON Si(111) BY IONIZED CLUSTER BEAM
- Lee, Dong-H. (Dept. of Materials Science and Engineering, K-JIST) ;
- Seong, T.Y. (Dept. of Materials Science and Engineering, K-JIST)
- Published : 1998.08.01
Abstract
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