Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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THE EFFECTS OF PRE-TREATMENT ON $Ta_2O_5$ DIELECTRICS FOR A DRAM CAPACITOR

  • Nam, K.J. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
  • Hyung, Y.W. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
  • Park, Y.W. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
  • Lee, S.I. (Semiconductor R&D Center, Samsung Electronics. Co.)
  • Published : 1998.08.01
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