Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.76.2-76
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- 1998
THE EFFECTS OF PRE-TREATMENT ON $Ta_2O_5$ DIELECTRICS FOR A DRAM CAPACITOR
- Nam, K.J. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
- Hyung, Y.W. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
- Park, Y.W. (Semiconductor R&D Center, Samsung Electronics. Co.) ;
- Lee, S.I. (Semiconductor R&D Center, Samsung Electronics. Co.)
- Published : 1998.08.01
Abstract
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