Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.110.3-110
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- 1998
DIRECT WAFER BONDING BETWEEN InP WAFER AND $Si_3N_4/InP$
- Kim, Sun-Woon (Div. of Mat. Sci. & Eng., Korea Univ.) ;
- Shin, D.S. (Div. of Mat. Sci. & Eng., Korea Univ.) ;
- Lee, J.Y. (Dept. of Mat. Sci. & Eng., KAIST) ;
- Choi, I.H. (Div. of Mat. Sci. & Eng., Korea Univ.)
- Published : 1998.08.01
Abstract
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