한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
- /
- Pages.76.1-76
- /
- 1998
EFFECTS OF $N_2O$ PRESSURE ON THE CHARACTERISTICS OF ULTRA-THIN GATE OXYNITRIDE
- Joo, Moon-Sig (Hyundai Electronics Industries Co., Ltd.) ;
- Lee, Chan-Ho (Hyundai Electronics Industries Co., Ltd.) ;
- Yeo, In-Seok (Hyundai Electronics Industries Co., Ltd.)
- 발행 : 1998.08.01