Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.108.3-108
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- 1998
AFM AND TEM STUDIOS OF TWO-DIMENSIONAL DOPANT PROFILES BY USING OF SELECTIVE CHEMICAL ETCHING
- Choi, C.J. (Dept. of Material Science and Engineering. K-JIST) ;
- Seong, T.Y. (Dept. of Material Science and Engineering. K-JIST) ;
- Hwang, H.S. (Dept. of Material Science and Engineering. K-JIST)
- Published : 1998.08.01
Abstract
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