한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.107.4-107
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- 1998
A STUDY ON THE EFFECT OF METALLIC IMPURITIES ON MICROROUGHNESS OF SI WAFER
- Choi, Hyung-Seok (Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University) ;
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Jeon, Hyeong-Tag
(Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University)
- 발행 : 1998.08.01