한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- Pages.69.3-69
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- 1998
INTERFICAL REACTION OF METAL THIN FILMS ON ION IMPLANTATED SILICON UNDER HIGH CURRENT DENSITY
- Lin, H.H. (Department of Materials Science and Engineering, National Tsing Hua University) ;
- Chen, K.N. (Department of Materials Science and Engineering, National Tsing Hua University) ;
- Cheng, S.L. (Department of Materials Science and Engineering, National Tsing Hua University) ;
- Chen, L.J. (Department of Materials Science and Engineering, National Tsing Hua University)
- 발행 : 1998.08.01