METAL-INDUCED LATERAL CRYSTALLIZATION OF AMORPHOUS SILICON FILMS ON GLASS USING RAPID THERMAL ANNEALING

  • Kim, Tae-Kyung (Div. of MS & E., College of Engineering, Seoul National University) ;
  • Lee, Byung-Il (Div. of MS & E., College of Engineering, Seoul National University) ;
  • Joo, Seung-Ki (Div. of MS & E., College of Engineering, Seoul National University)
  • Published : 1998.08.01